THE INTEGRATED UNIT FOR MEMS BASED PRESSURE MEASUREMENT March 2009

The article deals with a custom based integrated measurement unit

(IMU), which serves as processing device for MEMS based pressure

measurement.

 

The IMU consists of the three elementar stages, measurement

stage, processing stage and communication stage. They are

implemented on the one single board.

 

The measurement block has 16-bit resolution with 64 provided

measurement ranges to satisfy appropriate accuracy. The power

supply is 5 V, which allows to measure current with 238 nA step

within 1 mA measurement range.

The communication stage is based upon 12C standard.

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